Templated Solid State Dewetting of Thin Films and Nanostructures
Thin films used in microelectronic and other microsystems are metastable. If heated at sufficiently high temperatures they will agglomerate or dewet to form islands while remaining in the solid state. The temperature at which solid state dewetting occurs decreases as the thickness of a film is decreased and dewetting can occur well below a material’s melting temperature. The dewetting temperature also decreases as other dimensions are decreased, as in the case of the diameters of nanowires. Scaling of feature sizes in microelectronic systems has led to increasing pro
